Thin, Thinner, Thinnest: An Evolutionary Vision Of Crystalline Si Technology

Duerinckx, F., Gong, C., Filipek, I. G. I. K., Ma, Y., Posthuma, N. E., Gestel, D. V., … Poortmans, J. (2006). Thin, Thinner, Thinnest: An Evolutionary Vision Of Crystalline Si Technology. 21st EUPVSEC (2006), 1–6.