Two-step simulation method for automatic material handling system of semiconductor fab

Abstract

To design an effective automated material handling system (AMHS) in semiconductor fab, Samsung Electronics has used the commercial AMHS simulation software. Although this tool is very efficient at simulating material handling system, an additional simulation step is required to apply the production logic to the AMHS simulation model. Therefore, this paper introduces one more simulation step, namely the production simulation step. In the production simulation step, the production logic is implemented and the throughput of the semiconductor line can be predicted. The AMHS simulation step follows the production simulation step. In the AMHS simulation step, the capability of AMHS is predicted in advance, based on which the scope of investment can be estimated. © 2006 Elsevier Ltd. All rights reserved.