Abstract
The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.
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CITATION STYLE
APA
Sawatari, T., Klooster, A., Aslam, D. M., Lin, Y., & Marks, J. (2005). Ultra-miniature optical pressure sensing system. US Patent 6868736. Retrieved from www.google.com/patents/US6868736
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