Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation

Abstract

We report a method for compensation of errors caused by temperature fluctuations in refractive index measurements using Silicon photonic microring sensors. The method involves determination of resonance wavelength shifts caused by thermal fluctuations using real-time measurement of on-chip temperature variations and thermo-optic coefficient (TOC) of analyte liquids. Resistive metal lines patterned around Silicon microrings are used to track temperature variations and TOC of analyte is calculated by measuring wavelength shifts caused by controlled increments in device temperature. The TOC of de-ionized water is determined to be −1.12 × 10 −4 / • C, with an accuracy of ±8.26 × 10 −6 / • C. In our system, chip-surface temperature variations were measured with an instrument limited precision of 0.004 • C yielding a factor of 16 enhancement in tracking accuracy compared to conventional, bottom-of-chip temperature measurement. We show that refractive index detection limit of the microring sensor is also improved by the same factor., "Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding," Opt. Express 16, 15137-15148 (2008). 3.