Cyclotron resonance measurements of Si/SiGe two-dimensional electron gases with differing strain

  • Griffin N
  • Arnone D
  • Paul D
  • et al.
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Abstract

Far-infrared cyclotron resonance measurements have been used to investigate the effective mass in the strained silicon channels of modulation-doped, two-dimensional electron gases grown on relaxed Si1−xGex. By using a range of Ge fractions x, the effect of strain was investigated. Consistent results were obtained when the resonance positions were fitted to a model for zero-dimensional confinement, yielding m*≈0.196 me for most samples. The use of this formula was justified by invoking electron localization due to a disorder potential. The observed confinement effect was strongest in two samples where the Si channel was partially relaxed, suggesting this to be a possible mechanism. Qualitatively different results were obtained for a sample with a high background concentration of donor impurities, indicating that the type of disorder present can affect the nature of the resonances.

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Griffin, N., Arnone, D. D., Paul, D. J., Pepper, M., Robbins, D. J., Churchill, A. C., & Fernández, J. M. (1998). Cyclotron resonance measurements of Si/SiGe two-dimensional electron gases with differing strain. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 16(3), 1655–1658. https://doi.org/10.1116/1.589955

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