Analysis of static and dynamic properties of micromirror with the application of response surface method

Abstract

The paper presents the results of an application of response surface method to aid the analysis of variation of static and dynamic properties of micromirror. The multiphysics approach was taken into account to elaborate finite element model of electrostatically actuated microdevice and coupled analyses were carried out to yield the results. Used procedure of metamodel fitting is described and its quality is discussed. Elaborated approximations were used to perform the sensitivity analysis as well as to study the propagation of variation introduced by uncertain and control parameters. The input parameters deal with geometry, material properties and control voltage. As studied output characteristics there were chosen the resultant static vertical displacement of reflecting surfaces and the resonance frequency related to the first normal mode of vibration.