Compact scanning transmission X-ray microscope at the photon factory

Abstract

We report the design and performance of a compact scanning transmission X-ray microscope developed at the Photon Factory. Piezo-driven linear stages are used as coarse stages of the microscope to realize excellent compactness, mobility, and vibrational and thermal stability. An X-ray beam with an intensity of ∼107 photons/s was focused to a diameter of ∼40 nm at the sample. At the soft X-ray undulator beamline used with the microscope, a wide range of photon energies (250-1600 eV) is available. The microscope has been used to research energy materials and in environmental sciences.