Low oxidation conditions in pulsed laser deposition enhance polarization without degradation of endurance and retention in Hf0.5Zr0.5O2 films

Abstract

Interplay between oxygen vacancies and the stabilization of the ferroelectric orthorhombic phase in doped HfO2, as well as the resulting impact on endurance and retention, is far from being well understood. In Hf0.5Zr0.5O2 (HZO) thin films, it is commonly found that high polarization occurs usually at the the expense of robustness upon cycling due to the polarization-endurance dilemma. It has been reported that HZO thin films grown by pulsed laser deposition under the mixed Ar and O2 atmosphere exhibit a high polarization. Here, we show that this strategy enables functional properties tuning, allowing to obtain HZO films with high polarization at low oxidation conditions without degradation of endurance and retention.