Inkjet printing of plate acoustic wave devices

Abstract

In the paper, the results of production of Ag inkjet printed interdigital transducers to the acoustic delay line based on Y-cut X-propagation direction of lithium niobate plate for the frequency range from 1 to 14 MHz are presented. Additionally, morphological, structural, and electro-physical characteristics of the obtained electrodes were investigated. Mathematical modeling of the excitation of acoustic waves by these electrode structures was carried out. Comparison of the theoretical results with experimental ones showed their qualitative and quantitative coincidences. It was shown that conventional inkjet printing can replace the complex photolithographic method for production of interdigital transducers for acoustic delay lines working up to 14 MHz. The resulting electrode structures make it possible to efficiently excite acoustic waves with a high value of electromechanical coupling coefficient in piezoelectric plates.