Transparent and blue emitting - Ga2O3 thin film deposited by spray pyrolysis method

Abstract

Gallium oxide thin film was deposited by spray pyrolysis method using aqueous solution of gallium nitrate at substrate temperature 3500C. X ray diffraction peaks of the prepared thin film match with that of monoclinicß-Ga2O3 phase. The filmexhibit transmission percentage greater than 90% in the visible region. The band gap of the thin film is found to be 4.69eV.The photoluminescence spectrum of the thin film show a broad emission in the UV- blue region originating from oxygen and gallium vacancies present in the lattice. The sheet resistance of the film is estimated to be34k?.