The morphology and structure of zno thin films deposited by ald method

Abstract

This paper presents research results of zinc oxide thin films deposited on a glass substrate with use of ALD method. Our researches focused on analyzing of the influence of ALD deposition process temperature on the morphology and transparency of thin layers. The morphology was examined using both scanning and transmission electron microscopes. Transparency study was performed by UV-VIS spectroscopy. For our experiments, two sets of the coating have been prepared, differing in temperature and number of cycle used during the preparation process. The first set was deposited in 100 cycles, second one in 500 cycles. Each set of tested coating contained samples prepared at different temperatures.