Optimization and experiment of electromagnetic energy harvester by using NdFeB sputtered on high-aspect-ratio corrugated Si

Abstract

This paper shows a design optimization of MEMS (Microelectromechanical Systems) electromagnetic energy harvester by using finite element method (FEM) analysis to obtain a maximum generated power. The electromagnetic energy harvester consists of the sputtered NdFeB magnet film on a high-aspect-ratio corrugated Si structure and a counter Au serpentine coil. The each dimension of the device is optimally designed by using FEM simulation. After the prototyping with MEMS fabrication process, the measurement results of the power generation are 2.65 mV of the induced electromotive force and 7.60 nW of the output power with optimum load resistance of 231 Ω at the vibration condition of 100 Hz, 294 μmp-p.