Structural and electrical characterization of porous silicon carbide formed in n-6H-SiC substrates

Abstract

Investigation of porous silicon carbide layer morphology and its growth rate was studied along with electrical characterization. Morphology of the formed porous SiC layers was analyzed by scanning electron microscopy. The effective carrier density in porous layers was extracted from the capacitance-voltage characteristics of mercury probe Schottky contacts to the porous layer. It was found that the effective carrier density in porous layer and the pore density are in good correlation.