Influence of ce(iii)/ce(iv)-supplements on the characteristics of humidity sensors with tio2 films prepared via a sol-gel method

Abstract

Humidity sensors have been prepared via a sol-gel method to deposit TiO2 films with additions of Ce-compounds on alumina substrates, with interdigitated silver palladium electrodes. Observations by scanning electron microscopy (SEM) were performed in order to determine the surface morphology of the respective layers. Structural and compositional characterization was done by X-ray diffraction analysis (XRD), and energy dispersive X-ray spectroscopy (EDX) for investigation of the relation between the film structures and the parameters of the respective sensors. The influence of Ce-compounds on the electrical characteristics of the samples as humidity sensing elements has been evaluated by an impedance analyzer.