Image charge detection statistics relevant for deterministic ion implantation

Abstract

Image charge detection is a non-perturbative pre-detection approach for deterministic ion implantation. Using low energy ion bunches as a model system for highly charged single ions, we experimentally studied the error and detection rates of an image charge detector setup. The probability density functions of the signal amplitudes in the Fourier spectrum can be modelled with a generalised gamma distribution to predict error and detection rates. It is shown that the false positive error rate can be minimised at the cost of detection rate, but this does not impair the fidelity of a deterministic implantation process. Independent of the ion species, at a signal-to-noise ratio of 2, a false positive error rate of 0.1% is achieved, while the detection rate is about 22%.