Out-of-plane continuous electrostatic micro-power generators

Abstract

This paper presents an out-of-plane electrostatic micro-power generator (MPG). Electret-based continuous MPGs with different gaps and masses are fabricated to demonstrate the merits of this topology. Experimental results of the MPG demonstrate output power of 1 mW for a base acceleration amplitude and frequency of 0.08 g and 86 Hz. The MPGs also demonstrate a wideband harvesting bandwidth reaching up to 9 Hz. A free-flight and an impact mode model of electrostatic MPGs are also derived and validated by comparison to experimental results.