3D multi-microchannel helical mixer fabricated by femtosecond laser inside fused silica

Abstract

Three-dimensional (3D) multi-microchannel mixers can meet the requirements of different combinations according to actual needs. Rapid and simple creation of 3D multi-microchannel mixers in a "lab-on-a-chip" platform is a significant challenge in micromachining. In order to realize the complex mixing functions of microfluidic chips, we fabricated two kinds of complex structure micromixers for multiple substance mixes simultaneously, separately, and in proper order. The 3D multi-microchannel mixers are fabricated by femtosecond laser wet etch technology inside fused silica. The 3D multi-microchannel helical mixers have desirable uniformity and consistency, which will greatly expand their utility and scope of application.