Lower-Temperature processing of potassium niobate films by microwave-Assisted hydrothermal deposition technique

Abstract

Low-Temperature processing based on microwave-Assisted hydrothermal synthesis was proposed for deposition of piezoelectric oxoate KNbO3 films. The films were deposited on various substrates at reaction temperature below 200 °C using Nb2O5 powder and KOH solution. Epitaxial (100)c KNbO3 film with 1.3 m-Thick was deposited at a reaction temperature of 150 °C on (100)cSrRuO3//(100)SrTiO3 using 12 moldm 3 KOH solution for 80 min, which is significantly faster than conventional hydrothermal process.