Abstract
Plasma is found almost everywhere in the universe. Yet most people are not conscious of its presence, nor the role it plays in creating the electronic devices in our everyday lives. Virtually every semiconductor chip has been touched by plasma, which is used in nearly half of all semiconductor manufacturing steps today. These chips power our mobile phones, computers, automobiles, and are vital for making artificial intelligence a reality. With a reputation of mystery, the world of plasma processing has largely remained hidden from the consumer's view. What does plasma do in chipmaking? Why is it so critical? What does a process engineer do? To give the reader a sense of the importance that plasma plays in the electronics industry and how its energy has been harnessed into producing chips, this perspective aims to make this technology more relatable as it continues to change our everyday lives.
Cite
CITATION STYLE
Kanarik, K. J. (2020). Inside the mysterious world of plasma: A process engineer’s perspective. Journal of Vacuum Science & Technology A, 38(3). https://doi.org/10.1116/1.5141863
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