Abstract
A well-crystallized Pb(Mg 1/3Nb 2/3)O 3 (PMN) thin film on a Si wafer was prepared using low-temperature processing with a LaNiO 3 (LNO) seeding layer. The PMN thin film was crystallized at 550 °C on a LNO/Si stacking structure. Additionally, we attempted to apply the compressive residual stress to PMN layers for a Curie temperature shift. Results show that the ferroelectric property remained at room temperature. The remanent polarization increased concomitantly with increasing annealing temperature.
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CITATION STYLE
Ohno, T., Gotoh, Y., Sakamoto, N., Wakiya, N., Kiguchi, T., Matsuda, T., & Suzuki, H. (2012). Low temperature processing of alkoxide-derived PMN thin films. In IOP Conference Series: Materials Science and Engineering (Vol. 30). https://doi.org/10.1088/1757-899X/30/1/012002
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