Development of All-solid-state Thin-film Secondary Battery for MEMS and IoT Device

Abstract

All-solid-state thin-film secondary battery (TFB) has come to recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices which are indispensable for internet-of-things (IoT) solution. This paper presents on anode material development for TFB. Silicon is promising candidate to replace metallic lithium due to high heat-resistant and even high theoretical specific capacity. In this work, the effect of titanium addition on sputtered silicon electrode performance was investigated in order to improve not only mechanical damage but also resistivity.