In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.
Merlo, S., Poma, P., Crisà, E., Faralli, D., & Soldo, M. (2017). Testing of piezo-actuated glass micro-membranes by optical low-coherence reflectometry. Sensors (Switzerland), 17(3). https://doi.org/10.3390/s17030462