Journal Article

Analysis of U shaped MEMS Micro cantilever using COMSOL

  • Aparna K
  • et al.
International Journal of Recent Technology and Engineering (IJRTE) (2020) 8(6) 2860-2861
DOI: 10.35940/ijrte.f7453.038620
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Abstract

This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.

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APA

Aparna, K. D., & Amarnath, N. (2020). Analysis of U shaped MEMS Micro cantilever using COMSOL. International Journal of Recent Technology and Engineering (IJRTE), 8(6), 2860–2861. https://doi.org/10.35940/ijrte.f7453.038620

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