GHz bursts in MHz burst (BiBurst) enabling high-speed femtosecond laser ablation of silicon due to prevention of air ionization

Abstract

Highlights BiBurst femtosecond laser, which emits pulses combining GHz bursts in MHz bursts, can attain higher ablation speed in silicon ablation as compared with the conventional irradiation scheme (single-pulse mode). Temporal control of energy deposition by the BiBurst mode avoids air ionization and excess heat generation to perform high quality ablation. BiBurst mode can enhance ablation speed by a factor of 23 without deteriorating the ablation quality compared to the single-pulse mode ablation.