Fabrication of tungsten tip probes within 3 s by using flame etching

Abstract

A tungsten (W) tip has been used as a standard tip probe because of its robustness at the highest boiling temperature; the use cases include a field emission (FE) electron source for scanning electron microscopy (SEM) and a scanning probe microscopy tip. The W tip probe has generally been fabricated through a chemical etching process with aqueous solutions. In this study, we propose a new method-flame etching. Without using aqueous solutions, a W tip probe was successfully fabricated within 3 s in air, which is very fast and convenient, and beneficial for mass production (additionally, no expensive setup is necessary). A W tip probe was obtained simply by putting a W wire into an oxygen-liquefied petroleum (O2+LP) gas flame (giving the highest temperature of ∼2300 K) through a microtorch for a few seconds. The obtained W tip provided atomically resolved scanning tunneling microscopic images. Also, since FE electrons were detected by applying ∼106 V/m, the tip can be used as an FE-SEM source. Generation and vaporization of WO3 on the W surface are important processes to form a tip shape.