Impact of electron irradiation on electron holographic potentiometry

Abstract

While electron holography in the transmission electron microscope offers the possibility to measure maps of the electrostatic potential of semiconductors down to nanometer dimensions, these measurements are known to underestimate the absolute value of the potential, especially in GaN. We have varied the dose rates of electron irradiation over several orders of magnitude and observed strong variations of the holographically detected voltages. Overall, the results indicate that the electron beam generates electrical currents within the specimens primarily by the photovoltaic effect and due to secondary electron emission. These currents have to be considered for a quantitative interpretation of electron holographic measurements, as their negligence contributes to large parts in the observed discrepancy between the measured and expected potential values in GaN. © 2014 AIP Publishing LLC.