Fabrication of large scale texture on monocrystalline silicon surface based on friction-induced selective etching method

Abstract

The rapid development of high-technology area, such as information, biology and advanced manufacturing, puts forward new and stringent requirements for micro/nano fabrication method. It is essential to develop new methods for the micro/nano fabrication on silicon surface at large scale. By using self-built micro/nano fabrication equipment, large-area textures with various shapes are fabricated on monocrystalline silicon surface based on friction-induced selective etching method. The effect of pattern shape and line space of textures on the contact angle of silicon surface is studied. The results show that the smaller the line space, the larger the contact angle of texture. #-shaped texture reveals better hydrophobic property than the linear texture, which can increase the contact angle of silicon surface as large as 145%. In addition, the textured surface shows a good stability. Even after fabrication for one month, almost no change is detected for the contact angle on textured silicon surface. Therefore, the friction-induced selective etching provides a new approach to realize the functional texture on monocrystalline silicon surface at large scale.