970 MHz ovenized oscillator based on an ALN MEMS resonator with monolitically integrated suspended NANO hot plate

Abstract

This paper presents the design and experimental verification of the highest frequency (970 MHz) ovenized MEMS oscillator ever reported. Such high frequency of operation along with excellent phase noise (PN) performance (-83 dBc/Hz at 1kHz offset and-150 dBc/Hz floor) and efficient ovenization (temperature rise factor of 18.3 K/mW) are enabled by the introduction of a novel technology platform in which a fully anchored Aluminum Nitride (AlN) Lateral Field Excited-Floating (LFE-F) Contour Mode MEMS resonator (CMR) and a monolithically integrated nanoscale heating element are perfectly overlapped and separated by a sub-micron air gap.