Abstract
This paper proposes collision-free structure using NdFeB thin-film magnet for vibration energy harvesters. By using stripe shaped NdFeB magnet array on the Si MEMS structure, we finally obtained 3 mN of magnetic repulsive force on 8 × 8 mm2 specimen with 40 μm air-gap.
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CITATION STYLE
APA
Yoshii, S., Yamaguchi, K., Fujita, T., Kanda, K., & Maenaka, K. (2016). Collision-Free Structure Using Thin-Film Magnet for Electrostatic Energy Harvester. In Journal of Physics: Conference Series (Vol. 773). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/773/1/012013
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