Photovoltaic effect on differential capacitance profiles of low-energy-BF2+-implanted silicon wafers

Chang, M. N., Chen, C. Y., Pan, F. M., Lai, J. H., Wan, W. W., & Liang, J. H. (2003). Photovoltaic effect on differential capacitance profiles of low-energy-BF2+-implanted silicon wafers. Applied Physics Letters, 82(22), 3955–3957. https://doi.org/10.1063/1.1581987