Tomographic imaging of micrometer-sized optical and soft-x-ray beams

Abstract

The knife-edge technique for measurements of micrometer-sized beams is extended to two-dimensional imaging by tomographic reconstruction of multiangular knife-edge data. Two-dimensional intensity distributions at optical (633-nm) and soft-x-ray (13.5-nm) wavelengths at the focal region of a Schwarzschild objective are presented. The resolution is limited by the 200-nm step size used in the data acquisition. © 1990 Optical Society of America.