Modeling and Design Analysis of XY Flexure Stage Mechanism

Abstract

In micro-electro-mechanical system (MEMS) flexural mechanisms are commonly used because of their advantages such as frictionless and wear less motion and high precision. Flexures depend on material elasticity for their functionality. In flexure mechanism motion is generated due to elastic deformation of the beam from which it is made. One of the typical advantages of flexural mechanism is to gain precise deformation and flexibility to obtain motion in desired direction. This paper deals with Literature review of various paper based on XY stage mechanism. The XY positioning stage presented has monolithic structure and it is made from single piece of material with DFM.