High flexible piezoelectric PZT thin films deposited on stainless steel mesh

Abstract

This paper describes high flexible piezoelectric vibration energy harvesters (PVEHs) composed of PZT thin films on stainless steel (SS) mesh. The PZT thin films were deposited on Pt/Ti-coated SS mesh substrates which were plain-woven with the SS wire diameter of 15 μm and 30 μm, respectively. Relative dielectric constant of the PZT thin films on the SS mesh of 15 and 30 was measured to be 475, 263, respectively. In 15 device, the remnant polarization and the coercive field was 11.9 μC/cm2 and 48.7 kV/cm, respectively. For the measurement of the piezoelectric response, we attached conductive rubber sheets to the rectangular top electrode. The maximum output voltage of about 30 mV was measured in each bending motion. We confirmed the capability of the PZT thin films on SS mesh for the PVEH applications.