A novel mechanism for low- and high pressure measurement with variable-thickness diaphragm

Abstract

In pressure sensors, pressure measurement is based on the movements of the elastic elements under different pressures. Since there is no elastic element able to move under low and high pressures, there is a serious limitation to measuring low and high pressures concurrently. This paper proposes an innovative mechanism for measuring high and low pressures concurrently. In the proposed mechanism, a variable-thickness diaphragm and a protective part were used to measure a broad range of pressures. The proposed mechanism was manufactured and the accurate pressure source was used to test the behavior of the mechanism under different pressures. Using this configuration raised the sensitivity and accuracy of high-range pressure sensors, and increased the turndown ratio to 1500 by employing a new elastic element. Employing this mechanism in pressure sensors leads to use one pressure sensor for measuring a broad range of pressure instead of using several distinct sensors.