Design method for capacitive detection and driving integrated circuit of electrostatic suspension space-based ultra-quiet platform

Abstract

The capacitive Detection & Drive integrated circuit (CDDIC) is one of the key technologies of the electrostatic suspension space-based ultra-quiet platform. In order to control the broadband micro vibration of large-load platform, the CDDIC should have the compatibility between the high-frequency and the high-voltage feedback drivings. Based on the CDDIC in spaceborne electrostatic suspension accelerometer, the transfer characteristics of detecting and driving to the circuit output are derived. Based on the theory analysis of the transfer characteristics, two kinds of decoupling and denoising design methods are put forward in terms of the frequency domain and time domain respectively, which can effectively inhibit the linear/nonlinear coupling interference of the driving signals. Experimental results show that, by the proposed methods, the coupling effect can be reduced to <76.3 μV for the driving voltage with 1 kHz basic frequency and 1 kV amplitude.