Air Temperature Measurement Using CMOS-SOI-MEMS Sensor Dubbed Digital TMOS †

Abstract

Air temperature is an important meteorological parameter and is used for numerous purposes. Air temperature is usually observed using a radiation shield with ventilation, to obtain proper measurements by providing shade from direct solar radiation and increasing the heat exchange between the sensor and the atmosphere. In rural areas, such auxiliary equipment is not available and it is still a challenge to obtain the air temperature accurately without aspiration. In this study, we describe a novel, qualified, complementary metal-oxide-semiconductor-Microelectromechanical systems (CMOS-MEMS) low-cost sensor, dubbed Digital Thermal-MOS (TMOS), for remote temperature sensing of air temperature. The novel key ideas of this study are (i) the use of the Digital TMOS, (ii) a narrow optical bandpass filter (4.26 um +/− 90 nm) corresponding to the CO2 carbon dioxide absorption band; (iii) simultaneously measuring the weather parameters.