Abstract
Recently, we have realized a novel, very compact position sensing device for MOEMS mirrors, which is based on the measurement of a reflected light beam with a quadrant diode. This scheme is applicable to arbitrary trajectories and in this work we present the characteristics of this device, showing experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations. © 2013 Springer-Verlag Berlin Heidelberg.
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CITATION STYLE
Tortschanoff, A., Baumgart, M., Holzmann, D., Lenzhofer, M., Sandner, T., & Kenda, A. (2014). Compact optical position feedback scheme for MOEMS mirrors. In Microsystem Technologies (Vol. 20, pp. 743–749). Springer Verlag. https://doi.org/10.1007/s00542-013-2026-2
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