MICROELECTRONICS.

8Citations
Citations of this article
945Readers
Mendeley users who have this article in their library.
Get full text

Abstract

Although semiconductor-manufacturing technology is based on chemistry, too few chemical engineers have entered the field. A description of the processes, and the chemical engineering challenges that they involve is presented. The article discusses the following topics: the shrinking world of microelectronics, the chemistry of converting ferrosilicon to single-crystal silicon, chemistry in the device-fabrication process, microchemistry and microanalysis, chemical disciplines necessary for success, and chemical challenges lying ahead.

Cite

CITATION STYLE

APA

Larrabee, G. B. (1985). MICROELECTRONICS. Chemical Engineering (New York), 92(12), 51–59. https://doi.org/10.4324/9781351240451-7

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free