Abstract
Although semiconductor-manufacturing technology is based on chemistry, too few chemical engineers have entered the field. A description of the processes, and the chemical engineering challenges that they involve is presented. The article discusses the following topics: the shrinking world of microelectronics, the chemistry of converting ferrosilicon to single-crystal silicon, chemistry in the device-fabrication process, microchemistry and microanalysis, chemical disciplines necessary for success, and chemical challenges lying ahead.
Cite
CITATION STYLE
Larrabee, G. B. (1985). MICROELECTRONICS. Chemical Engineering (New York), 92(12), 51–59. https://doi.org/10.4324/9781351240451-7
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