Microfluidic structures for large-scale manufacture combining photo-patternable materials

Abstract

A novel application of SiNR, a photo-patternable adhesive material, commonly used for wafer bonding, is proposed as a promising option for fabricating, at industrial scale, fully assembled microfluidic devices at wafer level with resolution down to 15 μm. A self-sealing microchamber for real-time PCR analysis combining laminated SiNR dry films with in situ photo-patterned hydrogel passive valves is presented.