Synthesis, microstructural and optical characterization of LiNbO3 thin films deposited by aerosol assisted chemical vapor deposition

Abstract

This work reports the synthesis, micro-structural characterization and optical properties of lithium niobate (LiNbO3 ) thin films deposited by aerosol assisted chemical vapor deposition (AACVD) on silicon substrates. The films deposited were polycrystalline, uniform, dense, non- light scattering and firmly adhered to the substrate. This was deduced from high resolution electron microscopy studies and spectral reflectance measurements. The films were not epitax- ial; however, they are considered smooth enough to be employed in optical waveguide applica- tions, since their roughness is very low compared to the wavelength of the utilizable radiation