EUV APSM mask prospects and challenges

Lin, S.-J., Lee, C.-M., Chen, Y.-L., Tai, K.-L., Chen, L.-F., Huang, C.-C., & Tsai, F. F. G. (2023). EUV APSM mask prospects and challenges (p. 38). SPIE-Intl Soc Optical Eng. https://doi.org/10.1117/12.2688111