Impact of substrate temperature on surface and grain boundary reflection in thin chromium nanofilms

Abstract

The impact of substrate temperature on surface and grain boundary reflection is studied as a function of thickness of chromium nanofilms in the range, 10-80 nm. Substrate temperature happens to be one of the important and crucial deposition parameters, which regulates many physical properties of evaporated thin films. Hence, we have deposited the chromium nanofilms at four different substrate temperatures (Ts = 22, 100, 150 & 1800C) in order to study and analyze its effect on surface and grain boundary reflections and other electrical properties. In this work a qualitative analysis of both surface and grain boundary reflections of thin chromium nanofilms with independent variation of thickness is reported. The grain boundary reflection coefficients (R) have been calculated by estimating the resistivity data of the chromium nanofilms using Mayadas-Shatzkes and Fuchs-Sondheimer models. The substrate temperature dependent resistivity of chromium films exhibit an unusual behavior.