Two degree of freedom PZT MEMS actuated flapping wings with integrated force sensing

Abstract

This paper reports on the demonstration of microfabricated two degree of freedom actuated insect-inspired wings for small-scale robotics. Previous efforts demonstrated the feasibility of achieving insect-like stroke amplitudes in thin-film PZT actuated millimeter-scale wings [1]. Lift production in insect flight depends upon unsteady aerodynamic effects associated with three-dimensional kinematics utilizing both stroke (i.e. flap) and pitch (i.e. wing rotation) degrees of freedom [2]. Incorporation of wing rotation is essential to mimicking insect wing kinematics and hence force production. Closed loop flight control and device characterization have also motivated the development of feedback sensors. Two degree of freedom PZT MEMS actuators, directly controlling both stroke and pitch, have been monolithically integrated with compliant thin film wings and piezoelectric strain sensors.