Application of scanning shear-force microscope for fabrication of nanostructures

Abstract

In view of the rapid growth of interest in AFM technique in surface property investigation and local surface modification we describe here an AFM microscope with optical tip oscillation detection. The modular shear-force/tunneling microscope for surface topography measurement and nanoanodisation is described. The measurement instrument presented here is based on the fiber Fabry-Perot interferometer for the measurement of the conductive microtip oscillation that is used as nano e-beam for local surface anodisation. An advantage of this system is that quatitative measurements of tip vibration amplitude are easily performed.