Microscope imaging by time-of-flight secondary ion mass spectrometry

Abstract

The concept of Secondary Ion Microscopy, introduced by Castaing etal. [1], is applied to a direct imaging time-of-flight (TOF) massspectrometer. The ion optical configuration for a particular [2]stigmatic imaging TOF mass spectrometer is reviewed. A number offundamental factors influencing the mass resolution in any TOF spectrometerare discussed. The question of where microscope imaging offers advantagesover microprobe imaging in TOF Secondary Ion Mass Spectrometry isaddressed.