Journal ArticleOPEN ACCESS

Effect of Incidence Angle of Ions Caused by Inaccuracy of Stage Tilt Angle and Stage Rotation Angle on Sputter Depth Profiling Analysis

  • Matsumura S
Journal of Surface Analysis (2015) 22(2) 110-117
DOI: 10.1384/jsa.22.110
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Matsumura, S. (2015). Effect of Incidence Angle of Ions Caused by Inaccuracy of Stage Tilt Angle and Stage Rotation Angle on Sputter Depth Profiling Analysis. Journal of Surface Analysis, 22(2), 110–117. https://doi.org/10.1384/jsa.22.110

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