Gentle method for removing metal and restoring function after scanning electron microscopy

Abstract

An etching process is demonstrated for removing noble metal from microstructures to restore their original function after being characterized by scanning electron microscopy (SEM). Using neither aggressive acids nor high temperatures, the etching method gently removes gold/palladium alloys from complex three-dimensional microstructures, preserving their structural form. To explore the efficacy of the etching process, polymeric photonic crystals and monolithic microstructures were fabricated, metal coated, etched, and then structurally and optically characterized. Metal coating substantially diminishes the optical functional and transmission of the microstructures. SEM imaging performed throughout a series of metal sputtering, etching, and resputtering shows that the etching process does not significantly alter the form of a microstructure. Measurements of optical transmission using a scanned-optical-fiber system confirm that the etchant removes the metal and restores the optical properties of the microstructures.