Fluid simulations of radio frequency glow discharges: Two-dimensional argon discharge including metastables

Abstract

Two-dimensional self-consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow-discharge/neutral-transport-and-reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed "hot spots" in both axial and radial directions.