High-performance polycrystalline silicon thin-film transistor with multiple nanowire channels and lightly doped drain structure

Wu, Y. C., Chang, T. C., Chang, C. Y., Chen, C. S., Tu, C. H., Liu, P. T., … Tai, Y. H. (2004). High-performance polycrystalline silicon thin-film transistor with multiple nanowire channels and lightly doped drain structure. Applied Physics Letters, 84(19), 3822–3824. https://doi.org/10.1063/1.1745104