Microfabrication of high-aspect ratio knn lead-free piezoceramic pillar arrays by aqueous gelcasting

Abstract

The present paper reported a novel approach for the fabrication of a high-aspect ratio (K, Na)NbO3 (KNN) piezoelectric micropillar array via epoxy gelcasting, which involves the in situ consolidation of aqueous KNN suspensions with added hydantoin epoxy resin on a polydimethylsiloxane (PDMS) soft micromold. KNN suspensions with solid loadings of up to 45.0 vol.% have rheological behavior, which was suitable for the gelcasting process. The uniform green KNN bodies derived from the optimized suspension of 42.0 vol.% solid loading and 15.0 wt.% resin had exceptionally high mechanical strength (9.14 MPa), which was responsible for the integrity of the piezoceramic micropattern structure. The square-shaped KNN piezoelectric pillar array with lateral dimensions of up to 5 µm and an aspect ratio of up to five was successfully fabricated.